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Flexible OLED LLO Inspection Equipment

Flexible OLED LLO(Laser Lift-Off) Pre/Post Surface Inspection

We provide high-precision surface inspection equipment for Flexible
OLED LLO(Laser Lift-Off) processes, enabling real-time detection of
micro-scale panel defects before and after LLO. By combining advanced
optical design with proprietary image processing, the system improves
yield and supports stable process control.

Pre/post LLO analysis of organic layers and PI substrates for defect root-cause identification
Detection of micro-scratches and contamination using optimized lighting and high-resolution
cameras for transparent and reflective substrates
AI-based detection of irregular defects such as laser marks, delamination, and bubbles
Integrated qualiry management with pre/post process data comparison, defect traceability,
and process optimization guidance

OLED LTPS ELA Inspection Equipment

ELA(Excimer Laser Annealing) Crystallinity Inspection

We provide high-precision inspection equipment for measuring thin-film silicon
crystallinity during the ELA(Excimer Laser Annealing) stage in OLED
LTPS processes. The system detects micro-scale non-uniformities in real
time during the transition form amorphous silicon(a-Si) to polycrystalline
silicon(poly-Si), supporting stable process control and improved panel quality.

Early detection of crystallinity non-uniformity and mura caused by variations in laser energy
Real-time visualization of LTPS grain size and distribution for optimized laser parameter feedback
Real-time crystallinity monitoring and process feedback through integration with ELA equipment
Detection of micro-scale crystallinity variations using high-precision optics and advanced algorithms

OLED Laser Cutting 2D/3D Inspection Equipment

High-Precision 2D/3D Integrated Inspection with Hybrid Optics

We provide dedicated inspection equipment for detecting defects in large OLED
panels durgin laser cutting processes. A hybrid optical system combining
2D line-scan cameras and 3D confocal sensors enables high inspection
accuracy and efficiency.

Simultaneous 2D/3D inspection using a hybrid system with line-scan cameras and confocal sensors
Two-stage inspection : initial 2D screening followed by precise 3D inspection of suspected defects
Defect detection and classification algorithms optimized for laser cutting processes
Automatic sorting and tray loading of OK and NG parts via a discharge picker
High-rigidity mechanical design and high-speed precision conveying for large panel handling

Equipment Specifications

· Detection Criteria - Height ≥ 40 µm, Width (Length) ≥ 40 µm (95% reliability)

· Inspection Target - Metal sheets up to 1440 × 820 mm

Optical Specifications

Chormatic Confocal Sensor

· Sensor Type: Chromatic confocal (line type)

· Sensor Width: 1.26 mm

· Z Resolution: 0.125 µm

· Measurable Angle: 30°
Dual Line Scan Camera

· Camera: Dual Line Scan Camera

· Lens: 2X

· Pixel FOV : 5um

· Scan Speed:300mm/s
Vision Alignment

· Canera : Area Camera

· Pixel FOV : 28um

· FOV : 35 x 25mm

Multi Functional Glass AOI

Ultra-High-Speed AOI Equipment for Large-Area Glass Substrates

We offer high-performance AOI equipment designed to support a wide
range of glass substrates, from Gen6 to Gen10.5. It delivers superior
inspection performance and high throughput, improving efficiency
in large-area substrate inspection.

Supports a wide range of glass substrate sizes from Gen6 to Gen10.5
Delivers superior inspection performance and optimized process productivity
Integrates three inspection functions into a single process using
40 high-speed cameras
Inspects large Gen8 glass substrates in under 45 sec
Improves micro-defect detection through proprietary optical design and
high-speed image processing

Equipment Specifications

· Length - 7m

· Inspection Time - 45sec

· Defect Detection Rate: ≥93% (based on 1 μm surface scratch defects, average)

*Based on Gen8 glass substrate inspection equipment

Optical Specifications

· 1st Optics : Particle inspection (top & bottom surfaces)

· 2nd Optics : Internal contamination detection and size measurement

· 3rd Optics : Top surface defect inspection (e.g., scratches)

· 4th Optics : Bottom surface defect inspection (e.g., scratches)